Izumi Shigekazu
Environmental Safety Issues for Semiconductors : Research for Scarce Material Recycling
宇部工業高等専門学校研究報告 Volume 47
Page 43-51
published_at 2001-03
Title
半導体環境学 : 環境安全に配慮した稀少元素リサイクルに関する研究
Environmental Safety Issues for Semiconductors : Research for Scarce Material Recycling
Creators
Ito Mitsuru
Creators
Uchida Masakazu
Creators
Tao Eiji
Source Identifiers
Languages
jpn
Resource Type
departmental bulletin paper
Publishers
宇部工業高等専門学校
Date Issued
2001-03
File Version
Version of Record
Access Rights
open access
Relations
[ISSN]0386-4359