1995 - 1999 5

magnetic filter 5 negative ion source 3 vibrationally excited molecules 3 volume production 3 double plasma discharge 2 ECR plasma 1 H^- production 1 NBI heating 1 cesium vapor injection 1 electron energy distribution function 1 isotope effect 1 multi cusp plasma source 1 plasma CVD 1 reactive plasmas 1 source modeling 1 spatial control 1 surface production 1 tandem negative ion source 1

学術雑誌論文 5

大学院理工学研究科（工学） 5

福政 修 3 崎山 智司 1 田内 康 1 藤井 寛之 1