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Environmental Safety Issues for Semiconductors : Research for Scarce Material Recycling

宇部工業高等専門学校研究報告 Volume 47 Page 43-51
published_at 2001-03
UN20047000007.pdf
[fulltext] 1.17 MB
Title
半導体環境学 : 環境安全に配慮した稀少元素リサイクルに関する研究
Environmental Safety Issues for Semiconductors : Research for Scarce Material Recycling
Creators Izumi Shigekazu
Creators Sugano Tsuyoshi
Creators Shirahama Hiroyuki
Creators Ito Mitsuru
Creators Uchida Masakazu
Creators Tao Eiji
Source Identifiers
Languages jpn
Resource Type departmental bulletin paper
Publishers 宇部工業高等専門学校
Date Issued 2001-03
File Version Version of Record
Access Rights open access
Relations
[ISSN]0386-4359